Spatial resolution in atom probe tomography
File(s)1510.02893v1.pdf (1.46 MB)
Accepted version
Author(s)
Type
Journal Article
Abstract
This article addresses gaps in definitions and a lack of standard measurement techniques to assess the spatial resolution in atom probe tomography. This resolution is known to be anisotropic, being better in-depth than laterally. Generally the presence of atomic planes in the tomographic reconstruction is considered as being a sufficient proof of the quality of the spatial resolution of the instrument. Based on advanced spatial distribution maps, an analysis methodology that interrogates the local neighborhood of the atoms within the tomographic reconstruction, it is shown how both the in-depth and the lateral resolution can be quantified. The influences of the crystallography and the temperature are investigated, and models are proposed to explain the observed results. We demonstrate that the absolute value of resolution is specimen specific.
Date Issued
2010-02-01
Date Acceptance
2009-11-09
Citation
Microscopy and Microanalysis, 2010, 16 (1), pp.99-110
ISSN
1431-9276
Publisher
Cambridge University Press (CUP)
Start Page
99
End Page
110
Journal / Book Title
Microscopy and Microanalysis
Volume
16
Issue
1
Copyright Statement
© 2010 Cambridge University Press. This paper has been accepted for publication and will appear in a revised form, subsequent to peer-review and/or editorial input by Cambridge University Press.
Identifier
http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000274217300011&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=1ba7043ffcc86c417c072aa74d649202
Subjects
Science & Technology
Technology
Materials Science, Multidisciplinary
Microscopy
Materials Science
atom probe tomography
resolution
tomographic reconstruction
spatial distribution maps
trajectory aberration
FIELD-ION MICROSCOPE
LOCAL MAGNIFICATION
FOURIER-TRANSFORM
EVAPORATED IONS
POST-IONIZATION
RECONSTRUCTION
DESORPTION
PERFORMANCE
INSTRUMENT
SURFACES
Publication Status
Published
Date Publish Online
2010-01-18