Fabrication robustness in BIC metasurfaces
File(s)10.1515_nanoph-2021-0391.pdf (1.79 MB)
Published version
Author(s)
Type
Journal Article
Abstract
All-dielectric metasurfaces supporting photonic bound states in the continuum (BICs) are an exciting toolkit for achieving resonances with ultranarrow linewidths. However, the transition from theory to experimental realization can significantly reduce the optical performance of BIC-based nanophotonic systems, severely limiting their application potential. Here, we introduce a combined numerical/experimental methodology for predicting how unavoidable tolerances in nanofabrication such as random geometrical variations affect the performance of different BIC metasurface designs. We compare several established all-dielectric BIC unit cell geometries with broken in-plane inversion symmetry including tilted ellipses, asymmetric double rods, and split rings. Significantly, even for low fabrication-induced geometrical changes, both the BIC resonance amplitude and its quality factor (Q-factor) are significantly reduced. We find that the all-dielectric ellipses maintain the highest Q-factors throughout the geometrical variation range, whereas the rod and split ring geometries fall off more quickly. The same behavior is confirmed experimentally, where geometrical variation values are derived from automated processing of sets of scanning electron microscopy (SEM) images. Our methodology provides crucial insights into the performance degradation of BIC metasurfaces when moving from simulations to fabricated samples and will enable the development of robust, high-Q, and easy to manufacture nanophotonic platforms for applications ranging from biomolecular sensing to higher harmonic generation.
Date Issued
2021-12-01
Date Acceptance
2021-08-19
Citation
Nanophotonics, 2021, 10 (17), pp.4305-4312
ISSN
2192-8606
Publisher
De Gruyter
Start Page
4305
End Page
4312
Journal / Book Title
Nanophotonics
Volume
10
Issue
17
Copyright Statement
© 2021 Julius Kühne et al., published by De Gruyter, Berlin/Boston
License URL
Identifier
http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000721066500013&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=1ba7043ffcc86c417c072aa74d649202
Subjects
Science & Technology
Technology
Physical Sciences
Nanoscience & Nanotechnology
Materials Science, Multidisciplinary
Optics
Physics, Applied
Science & Technology - Other Topics
Materials Science
Physics
all-dielectric
bound states in the continuum
nanofabrication
nanophotonics
quality factor
BOUND-STATES
NANOPHOTONICS
LIGHT
Publication Status
Published