Buckling electrothermal NEMS actuators: analytic design for very slender beams
File(s)
Published version
Author(s)
Syms, Richard
Liu, Dixi
Type
Journal Article
Abstract
Analytic approximations are presented for the response of buckling-mode electrothermal actuators with very slender beams with a width-to-length ratio of W/L≤0.001
of the type found in nanoelectromechanical systems (NEMS). The results are found as closed-form solutions to the Euler beam bending theory rather than by an iterative numerical solution or a time-consuming finite element analysis. Expressions for transverse deflections and stiffness are presented for actuators with the common raised cosine and chevron pre-buckled shapes. The approximations are valid when the effects of bending dominate over those of axial compression. A few higher-order approximations are also presented for less slender beams with 0.001≤W/L≤0.01
.
of the type found in nanoelectromechanical systems (NEMS). The results are found as closed-form solutions to the Euler beam bending theory rather than by an iterative numerical solution or a time-consuming finite element analysis. Expressions for transverse deflections and stiffness are presented for actuators with the common raised cosine and chevron pre-buckled shapes. The approximations are valid when the effects of bending dominate over those of axial compression. A few higher-order approximations are also presented for less slender beams with 0.001≤W/L≤0.01
.
Date Issued
2022-01-13
Date Acceptance
2022-01-10
Citation
Micro, 2022, 2 (1), pp.54-67
ISSN
2673-8023
Publisher
MDPI AG
Start Page
54
End Page
67
Journal / Book Title
Micro
Volume
2
Issue
1
Copyright Statement
Copyright: © 2022 by the authors.
Licensee MDPI, Basel, Switzerland.
This article is an open access article
distributed under the terms and
conditions of the Creative Commons
Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/)
Licensee MDPI, Basel, Switzerland.
This article is an open access article
distributed under the terms and
conditions of the Creative Commons
Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/)
License URL
Identifier
https://www.mdpi.com/2673-8023/2/1/3
Publication Status
Published
Date Publish Online
2022-01-13