Sacrificial Layer Process with Laser-Driven Release for Batch Assembly Operations
File(s)Sacrificial layer process with.pdf (319.31 KB)
Published version
Author(s)
Holmes,A.S.
Saidam,S.M.
Type
Journal Article
Version
Published version
Date Issued
1998
Citation
IEE Microelectromechanical Systems, 1998, 4, 7, pp.416-422
ISSN
1057-7157
Start Page
416
End Page
422
Journal / Book Title
IEE Microelectromechanical Systems
Volume
7
Copyright Statement
© 1998 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder.
Source Volume Number
7
Edition
4