Room-temperature single dopant atom quantum dot transistors in silicon, formed by field-emission scanning probe lithography
File(s)RT QDs by SPL accepted version.pdf (3.19 MB)
Accepted version
Author(s)
Type
Journal Article
Abstract
Electrical operation of room-temperature (RT) single dopant atom quantum dot (QD) transistors, based on phosphorous atoms isolated within nanoscale SiO2 tunnel barriers, is presented. In contrast to single dopant transistors in silicon, where the QD potential well is shallow and device operation limited to cryogenic temperature, here, a deep (∼2 eV) potential well allows electron confinement at RT. Our transistors use ∼10 nm size scale Si/SiO2/Si point-contact tunnel junctions, defined by scanning probe lithography and geometric oxidation. “Coulomb diamond” charge stability plots are measured at 290 K, with QD addition energy ∼0.3 eV. Theoretical simulation gives a QD size of similar order to the phosphorous atom separation ∼2 nm. Extraction of energy states predicts an anharmonic QD potential, fitted using a Morse oscillator-like potential. The results extend single-atom transistor operation to RT, enable tunneling spectroscopy of impurity atoms in insulators, and allow the energy landscape for P atoms in SiO2 to be determined.
Date Issued
2018-10-09
Date Acceptance
2018-09-21
Citation
Journal of Applied Physics, 2018, 124 (14)
ISSN
0021-8979
Publisher
AIP Publishing
Journal / Book Title
Journal of Applied Physics
Volume
124
Issue
14
Copyright Statement
© 2018 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Journal of Applied Physics 2018 124:14 and may be found at https://dx.doi.org/10.1063/1.5050773
Sponsor
Commission of the European Communities
Grant Number
318804
Subjects
Science & Technology
Physical Sciences
Physics, Applied
Physics
NANOLITHOGRAPHY
NANOFABRICATION
MICROSCOPE
PHOSPHORUS
TRANSITION
DIOXIDE
DEVICES
STATES
LOGIC
GATE
01 Mathematical Sciences
02 Physical Sciences
09 Engineering
Applied Physics
Publication Status
Published
Article Number
144502